你的职责
- Plan schedule Preventive Maintenance activity in the shift - Chamber clean, Chemguard tank replacement, Chiller top-up.
- To receive passdown update from previous shift, to ensure passdown file updated at the end of each shift and to provide passdown to the next shift.
- Lead passdown meeting and attend enginering morning meeting on time.
- Perform tool troubleshooting on tool alarm events for the root cause identification and carry out corrective action plans.
- Perform scheduled/unscheduled PM on plasma/thermal tools. Perform wafer recovery procedure when tools having alarm.
- Perform routine 5S task in plasma/thermal working areas. Withdraw and collect parts from store for schedule PM/non-schedule PM. Support sub-FAB activities related to plasma tools (such as pump status checking, pump replacement, scrubber status check).
- Perform e-shipping request to ship out clean parts to cleaning facilities.Support on hold lot disposition.
