Master thesis-Investigation of Bosch-Process to Maximize Robustness & Full-wafer Uniformity (m/​f/​d)

Premstätten, Styria, Austria – ams-OSRAM AG

Your tasks

• Literature Review
o Comprehensive literature review of Bosch Process principles, critical parameters and their influence on full wafer uniformity.
o Comprehensive literature review on BMD (oxygen precipitates, vacancy/interstitial mechanisms) and known defect interactions during the Bosch DRIE process.
o Overview of recent trends and research interests in Bosch-process technologies.

• Experimental Work and Analysis
o Characterization of the current state of selected production equipment in regards of Silicon etch rate uniformity, deposition o Characterization of the current state of selected DRIE production equipment in regards of Silicon etch rate uniformity, deposition uniformity, breakthrough-etch uniformity and overall Bosch-process etch rate uniformity on full-wafer-uniformity basis.
o Characterization of Silicon etch rate uniformity, deposition uniformity, breakthrough-etch uniformity as a function of TSV depth.
o Characterization of starting wafer material: identification of type, size, density, and radial distribution of BMDs using LST/FTIR as the primary method, with TEM/FIB-SEM verification on selected sites.
o Probing the individual Bosch-Process steps for robustness and optimization of uniformity in a Design of Experiment setting.
o Set-up of an optimized Bosch process sequence with improved full wafer uniformity.

Objectives
o Identify the main factors responsible for non-uniformity effects close to the wafer edge.
o Determine type, size, density, and variation of BMDs in our starting material.
o Provide a model for predicting cycle-by-cycle progression of non-uniformity in regards of full-wafer uniformity and TSV depth.
o Develop a characterization procedure for full-wafer uniformity which allows to correlate electrical parameters to tool parameters.

Who we are looking for

• Ongoing Master’s studies in Materials Science, Chemistry, Chemical Engineering, Physics, or related fields.
• Knowledge of Design of Experiment (DoE) is an advantage.
• Ability for swift and determined execution of experimental tasks since the work will be carried out on a critical production tool.
• Experience of data processing and data visualization.
• Experience of working in a cleanroom environment is highly appreciated.
• Independent, structured, and analytical working style.
• Ability to report experimental results clearly and unambiguously to different audiences with the respective technical details required.
• Proficiency in English (written and spoken).

We offer competitive salaries and additional benefits based on your performance, experience, and qualifications. Employment is in accordance with the collective agreement for the electrical and electronics industry, employment group E (https://www.feei.at/aktuelles/mindestloehne-und-gehaelter-eei/).

ams OSRAM is an Equal Employment Opportunity Employer. Diversity, equity and inclusion is strongly established in our corporate culture and we firmly believe it makes us more successful as a company. All qualified applications will receive consideration for employment regardless of ethnic, national or social origin, gender, gender identity, sexual orientation, color, religion, age, physical and mental abilities.

Contact

Marlies Nigitz will be happy to answer any questions you may have.


Phone: +43 3136 500 32853

E-Mail: marlies.nigitz@ams-osram.com

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Job details

Posting date:2026/02/04
Experience level:Student
Type of contract:Bachelor/Master Thesis
Employment type:Part-time
Work Model:On site
Business unit:CMOS Sensors & ASICs
Organization:ams-OSRAM AG
Job field:Administration & Services
Job ID:22532

What we offer

Where you can find us

Our site in Premstätten

ams-OSRAM AG

8141 Premstätten, Styria

Austria

The ams OSRAM culture focuses on variety and innovation.

A more than motivating working atmosphere, combined with attractive training opportunities and performance-oriented compensation encourage our employees’ actions and promote their entrepreneurial spirit. An agile mindset, trust and integrity – for us at ams OSRAM, these values are not just empty promises, but an integral part of our corporate culture that we live every day. In fact, these are the key prerequisites for employees to fulfill even the highest requirements. Learn more about what you can expect from us!

Bringing intelligence to light and passion to innovation

The ams OSRAM Group is a global leader in innovative light and sensor solutions. As a specialist in Digital Photonics, we combine engineering excellence with cutting-edge global manufacturing to offer our customers the broadest portfolio of digital light and sensing technologies. “Sense the power of light” — our success has ever since been based on a deep understanding of the potential of light. For 120 years, we have been developing innovations that move markets: from automotive applications and industrial manufacturing to medical and consumer electronics. Around 19,000 employees worldwide are working on pioneering solutions alongside societal megatrends such as smart mobility, artificial intelligence, augmented reality, smart health, and robotics. This is reflected in over 12,000 patents granted and applied for.

The CSA division supplies sensors that bridge the gap between the world we live in and the digital world of machines. By converting physical signals - heartbeats, sounds, light waves - into data, we enable robots, cars and other devices to interact with people and improve our world. What drives CSA is a relentless desire to contribute to technology and have a meaningful impact on the world. This business thrives on solving complex problems and partnering with global leaders at the forefront of technological advancement. Our goal: to push the boundaries of sensor technology and empower innovators to make the world smarter, healthier and happier.

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